ASM International N.V.
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Publicatie datum
05 dec 2011 - 14:16
Statutaire naam
ASM International N.V.
Titel
ASM Qualifies New Higher-k Gate Process for 14nm Manufacturing
Bericht
Milestone Achieved at Key Customer Development Fab
ALMERE, The Netherlands, December 5, 2011 -ASM International N.V. (www.asm.com) (NASDAQ: ASMI and Euronext Amsterdam: ASM), the leader in atomic layer deposition (ALD) of high-k gate materials, today announced the successful demonstration of a new 14nm high-k gate dielectric process that achieved less than 6 angstroms equivalent oxide thickness (EOT) at a customer's 14nm R&D line, an improvement of about 40% from the current advanced nodes.
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