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ASM International N.V.

ASM International N.V.

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Publicatie datum 29 apr 2010 - 00:12
Statutaire naam ASM International N.V.
Titel ASM International Books Repeat Orders for Plasma Enhanced ALD Systems, Broadening its ALD Portfolio with New Applications
Bericht ALMERE, The Netherlands, April 28, 2010 -ASM International N.V. (www.asm.com) (NASDAQ: ASMI and Euronext Amsterdam: ASM) today announced that it has received multiple repeat orders this year for its plasma enhanced atomic layer deposition (PEALD) systems from a leading memory customer in Asia for volume manufacturing at multiple fab lines. All systems will be used for dielectrics in double patterning applications for advanced lithography at the 3X technology node and below.